Research Stories

Establishment of MEMS and Sensor Research Platform

Establishment of a platform for the growth of the semiconductor materials∙components∙equipment industry

Advanced Materials Science and Engineering

  • Establishment of MEMS and Sensor Research Platform
  • Establishment of MEMS and Sensor Research Platform
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Sungkyunkwan University's Material & Process Platform Center for Convergence Sensor (Director, Prof. Su-Jeong Suh), supported by the Gyeonggi Regional Research Center (GRRC) project, developed advanced materials and process technologies necessary to secure the original technology with 7 professors and 10 companies.

Also, conducting industry-academic research to become a technological and industrial base that leads the global sensor industry by developing Master's and doctorate personnel in the field.

Prof. Suh, While working as a professor in the school of Materials Science and Engineering for 33 years, not only academic achievement but also carried out large-scale government support projects based on materials and processes such as Technology Innovation Center (TIC), Regional Research Center (RRC), Regional Innovation system (RIS), Regional Innovation Center (RIC) supported by Ministry of Trade, Industry and Energy, Ministry of Science and ICT, Ministry of Education, Ministry of SMEs and Startups, and Gyeonggi Province. Through these research funds, research equipment infrastructure such as clean rooms and ultra-precision analysis equipment was established.

Recently, Prof. Suh established a semiconductor process (cleaning, oxidation, photolithography, etching, sputter, CMP, bonder, etc.) facility for 8-inch wafer processing in the FAB. Through this expansion of the research base, various government projects (technology development projects for Materials ‧ Components ‧ Equipment, core research support center, and University Innovation Center (UIC)) are attracted and carried out with many excellent faculty members. In addition, the center has a performance of infrastructure expansion and technical support for 520 external companies.

Prof. Suh, over the past five years, has achieved the application and registration of 29 domestic and oversea patents and 12 technology transfers, including patent transfers to U.S. companies. And he attracted a "field human power development project" using semiconductor infrastructure, and conducted sensor and semiconductor classes producing 314 workers and 522 unemployed workers. In addition, 730 workers and 290 unemployed workers will be trained by 2027.

The appointment of Prof. Suh as the distinguished professor is expected to accelerate industry-university cooperation by activating the center's established equipment and a cooperative system with industry.